Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842753 | Absorbing lamphead face | Paul Brillhart, Joseph M. Ranish, Satheesh Kuppurao, Zuoming ZHU | 2017-12-12 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more | 2017-11-28 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Swaminathan Srinivasan +1 more | 2017-02-28 |