Issued Patents 2017
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2017-12-19 |
| 9842759 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa | 2017-12-12 |
| 9842753 | Absorbing lamphead face | Paul Brillhart, Satheesh Kuppurao, Balasubramanian Ramachandran, Zuoming ZHU | 2017-12-12 |
| 9839976 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2017-12-12 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more | 2017-11-28 |
| 9818587 | Off-angled heating of the underside of a substrate using a lamp assembly | Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam | 2017-11-14 |
| 9814099 | Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same | Shu-Kwan LAU, Paul Brillhart, Mehmet Tugrul Samir | 2017-11-07 |
| 9793145 | Support ring with encapsulated light barrier | — | 2017-10-17 |
| 9786529 | Pyrometry filter for thermal process chamber | Bruce E. Adams | 2017-10-10 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| 9754807 | High density solid state light source array | John E. Gerling, Oleg V. Serebryanov, Joseph R. Johnson | 2017-09-05 |
| 9748121 | Thermal coupled quartz dome heat sink | Mehmet Tugrul Samir, Paul Brillhart | 2017-08-29 |
| 9728471 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Aaron Muir Hunter | 2017-08-08 |
| 9711382 | Dome cooling using compliant material | Paul Brillhart | 2017-07-18 |
| 9682398 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Kailash Kiran Patalay | 2017-06-20 |
| 9659809 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2017-05-23 |
| 9640412 | Apparatus and method for enhancing the cool down of radiatively heated substrates | Wolfgang Aderhold, Blake Koelmel | 2017-05-02 |
| 9595459 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Abhilash J. Mayur, Sundar Ramamurthy, Aaron Muir Hunter | 2017-03-14 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2017-02-28 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2017-02-07 |
| 9552989 | Apparatus and method for improved control of heating and cooling of substrates | Blake Koelmel, Norman L. Tam | 2017-01-24 |
| 9543172 | Apparatus for providing and directing heat energy in a process chamber | Joseph R. Johnson, John E. Gerling, Mathew Abraham, Aaron Muir Hunter, Aneesh Nainani | 2017-01-10 |
| 9536729 | Tubular light source having overwind | — | 2017-01-03 |
| 9536728 | Lamp for rapid thermal processing chamber | Khurshed Sorabji | 2017-01-03 |