| 9845550 |
Upper dome with injection assembly |
Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more |
2017-12-19 |
| 9842759 |
Support ring with masked edge |
Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa |
2017-12-12 |
| 9842753 |
Absorbing lamphead face |
Paul Brillhart, Satheesh Kuppurao, Balasubramanian Ramachandran, Zuoming ZHU |
2017-12-12 |
| 9839976 |
Annealing apparatus using two wavelengths of radiation |
Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more |
2017-12-12 |
| 9832816 |
Absorbing reflector for semiconductor processing chamber |
Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more |
2017-11-28 |
| 9818587 |
Off-angled heating of the underside of a substrate using a lamp assembly |
Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam |
2017-11-14 |
| 9814099 |
Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same |
Shu-Kwan LAU, Paul Brillhart, Mehmet Tugrul Samir |
2017-11-07 |
| 9793145 |
Support ring with encapsulated light barrier |
— |
2017-10-17 |
| 9786529 |
Pyrometry filter for thermal process chamber |
Bruce E. Adams |
2017-10-10 |
| 9768043 |
Quartz upper and lower domes |
Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more |
2017-09-19 |
| 9754807 |
High density solid state light source array |
John E. Gerling, Oleg V. Serebryanov, Joseph R. Johnson |
2017-09-05 |
| 9748121 |
Thermal coupled quartz dome heat sink |
Mehmet Tugrul Samir, Paul Brillhart |
2017-08-29 |
| 9728471 |
System for non radial temperature control for rotating substrates |
Wolfgang Aderhold, Aaron Muir Hunter |
2017-08-08 |
| 9711382 |
Dome cooling using compliant material |
Paul Brillhart |
2017-07-18 |
| 9682398 |
Substrate processing system having susceptorless substrate support with enhanced substrate heating control |
Kailash Kiran Patalay |
2017-06-20 |
| 9659809 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more |
2017-05-23 |
| 9640412 |
Apparatus and method for enhancing the cool down of radiatively heated substrates |
Wolfgang Aderhold, Blake Koelmel |
2017-05-02 |
| 9595459 |
Managing thermal budget in annealing of substrates |
Stephen Moffatt, Abhilash J. Mayur, Sundar Ramamurthy, Aaron Muir Hunter |
2017-03-14 |
| 9580835 |
Multizone control of lamps in a conical lamphead using pyrometers |
Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more |
2017-02-28 |
| 9564349 |
Rapid thermal processing chamber with micro-positioning system |
Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more |
2017-02-07 |
| 9552989 |
Apparatus and method for improved control of heating and cooling of substrates |
Blake Koelmel, Norman L. Tam |
2017-01-24 |
| 9543172 |
Apparatus for providing and directing heat energy in a process chamber |
Joseph R. Johnson, John E. Gerling, Mathew Abraham, Aaron Muir Hunter, Aneesh Nainani |
2017-01-10 |
| 9536729 |
Tubular light source having overwind |
— |
2017-01-03 |
| 9536728 |
Lamp for rapid thermal processing chamber |
Khurshed Sorabji |
2017-01-03 |
