Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more | 2017-11-28 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| 9739666 | Model based lamp background filtration of stray radiation for pyrometry | Aaron Muir Hunter | 2017-08-22 |
| 9682398 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Joseph M. Ranish | 2017-06-20 |
| 9570328 | Substrate support for use with multi-zonal heating sources | Errol Antonio C. Sanchez | 2017-02-14 |