Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2017-12-19 |
| 9842753 | Absorbing lamphead face | Paul Brillhart, Joseph M. Ranish, Balasubramanian Ramachandran, Zuoming ZHU | 2017-12-12 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Daniel Redfield, Joseph M. Ranish +6 more | 2017-11-28 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Mehmet Tugrul Samir, David K. Carlson +9 more | 2017-09-19 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2017-02-28 |