Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, James Francis Mack, Zhiyuan Ye +5 more | 2017-12-19 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more | 2017-11-28 |
| 9735002 | Integrated apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Brett Christian Hoogensen, Sandy M. Wen, Steven H. Kim | 2017-08-15 |