Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735002 | Integrated apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Kin Pong Lo, Brett Christian Hoogensen, Steven H. Kim | 2017-08-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735002 | Integrated apparatus for efficient removal of halogen residues from etched substrates | Mark Kawaguchi, Kin Pong Lo, Brett Christian Hoogensen, Steven H. Kim | 2017-08-15 |