Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842748 | Flow controlled liner having spatially distributed gas passages | Mehmet Tugrul Samir | 2017-12-12 |
| 9814099 | Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same | Joseph M. Ranish, Paul Brillhart, Mehmet Tugrul Samir | 2017-11-07 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| 9553002 | Flow controlled liner having spatially distributed gas passages | Mehmet Tugrul Samir | 2017-01-24 |