Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9683308 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2017-06-20 |
| 9659809 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more | 2017-05-23 |
| 9558982 | Minimal contact edge ring for rapid thermal processing | Heng Pan, Sairaju Tallavarjula, Kevin Joseph Bautista | 2017-01-31 |