Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831091 | Plasma treating a process chamber | Wei Liu, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui, Philip A. Bottini +3 more | 2017-11-28 |
| 9683308 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2017-06-20 |