Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9809881 | Method and apparatus for multizone plasma generation | Matthew S. Rogers, Zhong Qiang Hua | 2017-11-07 |
| 9728401 | Methods for conformal treatment of dielectric films with low thermal budget | Heng Pan, Matthew S. Rogers | 2017-08-08 |
| 9683308 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Theresa Kramer Guarini, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2017-06-20 |