Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831091 | Plasma treating a process chamber | Wei Liu, Theresa Kramer Guarini, Huy Q. Nguyen, Malcolm J. Bevan, Houda Graoui +3 more | 2017-11-28 |
| 9773692 | In-situ removable electrostatic chuck | Michael S. Cox, Steven V. Sansoni | 2017-09-26 |
| 9683308 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Jeffrey Tobin, Peter Stone, Chi-Wei Lo +1 more | 2017-06-20 |
| D790039 | Showerhead for a semiconductor processing chamber | Kong CHAN, Aaron Miller | 2017-06-20 |