Issued Patents 2017
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790589 | Gas cooled substrate support for stabilized high temperature deposition | Brian T. West, Jeonghoon Oh | 2017-10-17 |
| 9779975 | Electrostatic carrier for thin substrate handling | — | 2017-10-03 |
| 9779920 | Sputtering target with backside cooling grooves | Brian T. West, Jeonghoon Oh | 2017-10-03 |
| 9773692 | In-situ removable electrostatic chuck | Lara Hawrylchak, Steven V. Sansoni | 2017-09-26 |
| 9754771 | Encapsulated magnetron | Brian T. West, Roger M. Johnson | 2017-09-05 |
| 9735037 | Locally heated multi-zone substrate support | — | 2017-08-15 |
| 9721820 | End effector for transferring a substrate | Michel A. Rosa | 2017-08-01 |
| 9711386 | Electrostatic chuck for high temperature process applications | Zheng Yuan | 2017-07-18 |
| 9649592 | Plasma abatement of compounds containing heavy atoms | Monique McIntosh, Colin John Dickinson, Paul Fisher, Yutaka Tanaka, Zheng Yuan | 2017-05-16 |
| 9580796 | Deposition apparatus and methods to reduce deposition asymmetry | Alan A. Ritchie | 2017-02-28 |
| 9552967 | Abatement system having a plasma source | Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2017-01-24 |
| 9543124 | Capacitively coupled plasma source for abating compounds produced in semiconductor processes | Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2017-01-10 |
| 9536768 | Electrostatic carrier for thin substrate handling | — | 2017-01-03 |