Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812303 | Configurable variable position closed track magnetron | Ryan Edwin Hanson, Xianwei Zhao | 2017-11-07 |
| 9695502 | Process kit with plasma-limiting gap | Donny Young | 2017-07-04 |
| 9611539 | Crystalline orientation and overhang control in collision based RF plasmas | Zhenbin Ge, Adolph Miller Allen | 2017-04-04 |
| 9593410 | Methods and apparatus for stable substrate processing with multiple RF power supplies | Zhenbin Ge | 2017-03-14 |
| 9593417 | Gas line weldment design and process for CVD aluminum | Wei Ti Lee, Ted Guo, Steve H. Chiao | 2017-03-14 |
| 9580796 | Deposition apparatus and methods to reduce deposition asymmetry | Michael S. Cox | 2017-02-28 |