Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D798248 | Target profile for a physical vapor deposition chamber target | Ryan Edwin Hanson, Vivek Gupta | 2017-09-26 |
| 9765432 | Dual-direction chemical delivery system for ALD/CVD chambers | Chien-Teh Kao, Joel M. Huston, Mei Chang | 2017-09-19 |
| 9759984 | Adjustable solid film camera aperture | Tingjun Xu, Jeffrey N. Gleason, Linsen Bie, Ligang Wang, Wookyung Bae +1 more | 2017-09-12 |
| 9611539 | Crystalline orientation and overhang control in collision based RF plasmas | Alan A. Ritchie, Adolph Miller Allen | 2017-04-04 |
| 9593410 | Methods and apparatus for stable substrate processing with multiple RF power supplies | Alan A. Ritchie | 2017-03-14 |