Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837250 | Hot wall reactor with cooled vacuum containment | Olkan Cuvalci, Michael P. Karazim, Joseph Yudovsky | 2017-12-05 |
| 9831109 | High temperature process chamber lid | Ilker Durukan, Dien-Yeh Wu, Chien-Teh Kao, Mei Chang | 2017-11-28 |
| 9765432 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Mei Chang | 2017-09-19 |
| 9627185 | Methods and apparatus for in-situ cleaning of a process chamber | Nicholas R. Denny, Chien-Teh Kao | 2017-04-18 |
| 9543186 | Substrate support with controlled sealing gap | Olkan Cuvalci, Gwo-Chuan Tzu | 2017-01-10 |