Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831109 | High temperature process chamber lid | Ilker Durukan, Joel M. Huston, Dien-Yeh Wu, Mei Chang | 2017-11-28 |
| 9765432 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Joel M. Huston, Mei Chang | 2017-09-19 |
| 9627185 | Methods and apparatus for in-situ cleaning of a process chamber | Joel M. Huston, Nicholas R. Denny | 2017-04-18 |
| 9551070 | In-situ corrosion resistant substrate support coating | Mei-Ying Chang, Juno Yu-Ting Huang | 2017-01-24 |