Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831109 | High temperature process chamber lid | Ilker Durukan, Joel M. Huston, Dien-Yeh Wu, Chien-Teh Kao | 2017-11-28 |
| 9773663 | Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD | Jessica S. Kachian, Naomi Yoshida, Mary Edmonds, Andrew C. Kummel, Sang Wook Park +1 more | 2017-09-26 |
| 9765432 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Joel M. Huston | 2017-09-19 |
| 9683287 | Deposition of films comprising aluminum alloys with high aluminum content | David Thompson, Srinivas Gandikota, Xinliang Lu, Wei V. Tang, Jing Zhou +6 more | 2017-06-20 |