Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824889 | CVD silicon monolayer formation method and gate oxide ALD formation on III-V materials | Mary Edmonds, Mei Chang, Jessica S. Kachian | 2017-11-21 |
| 9818599 | Method for in-situ dry cleaning, passivation and functionalization of Si—Ge semiconductor surfaces | Tobin Kaufman-Osborn, Kiarash Kiantaj | 2017-11-14 |
| 9773663 | Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD | Jessica S. Kachian, Naomi Yoshida, Mei Chang, Mary Edmonds, Sang Wook Park +1 more | 2017-09-26 |
| 9761443 | Method for passivating surfaces, functionalizing inert surfaces, layers and devices including same | Jun Hong Park | 2017-09-12 |
| 9607920 | Self-limiting chemical vapor deposition and atomic layer deposition methods | Mary Edmonds, Atif Noori | 2017-03-28 |