Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818599 | Method for in-situ dry cleaning, passivation and functionalization of Si—Ge semiconductor surfaces | Tobin Kaufman-Osborn, Andrew C. Kummel | 2017-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818599 | Method for in-situ dry cleaning, passivation and functionalization of Si—Ge semiconductor surfaces | Tobin Kaufman-Osborn, Andrew C. Kummel | 2017-11-14 |