Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837250 | Hot wall reactor with cooled vacuum containment | Joel M. Huston, Olkan Cuvalci, Michael P. Karazim | 2017-12-05 |
| 9765434 | Apparatus for susceptor temperature verification and methods of use | Kevin Griffin | 2017-09-19 |
| 9721757 | Elongated capacitively coupled plasma source for high temperature low pressure environments | John C. Forster, Garry K. Kwong, Tai T. Ngo, Kevin Griffin, Kenneth S. Collins +1 more | 2017-08-01 |
| 9663859 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Garry K. Kwong, Kevin Griffin | 2017-05-30 |
| 9631277 | Atomic layer deposition carousel with continuous rotation and methods of use | — | 2017-04-25 |
| 9617640 | Apparatus and methods for injector to substrate gap control | Kevin Griffin, Kaushal Gangakhedkar | 2017-04-11 |