Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9765434 | Apparatus for susceptor temperature verification and methods of use | Joseph Yudovsky | 2017-09-19 |
| 9721757 | Elongated capacitively coupled plasma source for high temperature low pressure environments | John C. Forster, Joseph Yudovsky, Garry K. Kwong, Tai T. Ngo, Kenneth S. Collins +1 more | 2017-08-01 |
| 9663859 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Garry K. Kwong, Joseph Yudovsky | 2017-05-30 |
| 9617640 | Apparatus and methods for injector to substrate gap control | Joseph Yudovsky, Kaushal Gangakhedkar | 2017-04-11 |