Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837250 | Hot wall reactor with cooled vacuum containment | Joel M. Huston, Michael P. Karazim, Joseph Yudovsky | 2017-12-05 |
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Avgerinos V. Gelatos, Kai Wu +1 more | 2017-10-10 |
| 9633889 | Substrate support with integrated vacuum and edge purge conduits | Gwo-Chuan Tzu | 2017-04-25 |
| 9543186 | Substrate support with controlled sealing gap | Joel M. Huston, Gwo-Chuan Tzu | 2017-01-10 |