Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Avgerinos V. Gelatos, Olkan Cuvalci +1 more | 2017-10-10 |
| 9748105 | Tungsten deposition with tungsten hexafluoride (WF6) etchback | Sang Ho Yu | 2017-08-29 |
| 9653352 | Methods for forming metal organic tungsten for middle of the line (MOL) applications | Liqi Wu, Sang Ho Yu, Kazuya Daito, Kie Jin Park, David Thompson | 2017-05-16 |