Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Avgerinos V. Gelatos, Olkan Cuvalci, Kai Wu +1 more | 2017-10-10 |
| 9546419 | Method of reducing tungsten film roughness and resistivity | Avgerinos V. Gelatos | 2017-01-17 |