Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842769 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2017-12-12 |
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Olkan Cuvalci, Kai Wu +1 more | 2017-10-10 |
| 9735009 | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel | Bo Zheng, Anshul Ashok Vyas, Raymond Hung | 2017-08-15 |
| 9685371 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2017-06-20 |
| 9637819 | Methods for preferential growth of cobalt within substrate features | Bhushan Zope | 2017-05-02 |
| 9601339 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Atif Noori, Mei Chang, David Thompson +1 more | 2017-03-21 |
| 9546419 | Method of reducing tungsten film roughness and resistivity | Amit Khandelwal | 2017-01-17 |