Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842769 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Srinivas Gandikota +2 more | 2017-12-12 |
| 9834840 | Process kit shield for improved particle reduction | Muhammad M. Rasheed, Rongjun Wang, Zhendong Liu, Xianmin Tang | 2017-12-05 |
| 9685371 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Srinivas Gandikota +2 more | 2017-06-20 |
| 9601339 | Methods for depositing fluorine/carbon-free conformal tungsten | Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson +1 more | 2017-03-21 |
| 9595466 | Methods for etching via atomic layer deposition (ALD) cycles | Srinivas Gandikota, Mei Chang, Seshadri Ganguli, Guoqiang Jian, Yixiong Yang +2 more | 2017-03-14 |