Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834840 | Process kit shield for improved particle reduction | Muhammad M. Rasheed, Rongjun Wang, Xinyu Fu, Xianmin Tang | 2017-12-05 |
| 9752228 | Sputtering target for PVD chamber | Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung, Muhammad M. Rasheed | 2017-09-05 |
| 9583349 | Lowering tungsten resistivity by replacing titanium nitride with titanium silicon nitride | Srinivas Gandikota, Jianxin Lei, Rajkumar Jakkaraju | 2017-02-28 |