Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834840 | Process kit shield for improved particle reduction | Muhammad M. Rasheed, Rongjun Wang, Zhendong Liu, Xinyu Fu | 2017-12-05 |
| 9812328 | Methods for forming low resistivity interconnects | Kaushal K. Singh, Er-Xuan Ping, Sundar Ramamurthy, Randhir P. S. Thakur | 2017-11-07 |
| 9752228 | Sputtering target for PVD chamber | Zhendong Liu, Rongjun Wang, Srinivas Gandikota, Tza-Jing Gung, Muhammad M. Rasheed | 2017-09-05 |
| 9633824 | Target for PVD sputtering system | Thanh X. Nguyen, Yong Cao, Muhammad M. Rasheed | 2017-04-25 |
| 9633839 | Methods for depositing dielectric films via physical vapor deposition processes | Weimin Zeng, Thanh X. Nguyen, Yana Cheng, Yong Cao, Daniel Lee Diehl +2 more | 2017-04-25 |