Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773665 | Particle reduction in a physical vapor deposition chamber | Thanh X. Nguyen, Yong Cao | 2017-09-26 |
| 9633839 | Methods for depositing dielectric films via physical vapor deposition processes | Thanh X. Nguyen, Yana Cheng, Yong Cao, Daniel Lee Diehl, Srinivas Guggilla +2 more | 2017-04-25 |