Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834840 | Process kit shield for improved particle reduction | Rongjun Wang, Zhendong Liu, Xinyu Fu, Xianmin Tang | 2017-12-05 |
| 9752228 | Sputtering target for PVD chamber | Zhendong Liu, Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung | 2017-09-05 |
| 9689070 | Deposition ring and electrostatic chuck for physical vapor deposition chamber | Keith A. Miller, Rongjun Wang | 2017-06-27 |
| 9633824 | Target for PVD sputtering system | Thanh X. Nguyen, Yong Cao, Xianmin Tang | 2017-04-25 |
| 9534286 | PVD target for self-centering process shield | Goichi Yoshidome, Ryan Edwin Hanson, Donny Young, Keith A. Miller | 2017-01-03 |