Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783889 | Apparatus for variable substrate temperature control | Xiaoxiong Yuan, Amit Khandelwal, Avgerinos V. Gelatos, Olkan Cuvalci, Kai Wu +1 more | 2017-10-10 |
| 9633889 | Substrate support with integrated vacuum and edge purge conduits | Olkan Cuvalci | 2017-04-25 |
| 9587310 | Lid assembly for a processing system to facilitate sequential deposition techniques | Salvador P. Umotoy | 2017-03-07 |
| 9543186 | Substrate support with controlled sealing gap | Olkan Cuvalci, Joel M. Huston | 2017-01-10 |