Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9853579 | Rotatable heated electrostatic chuck | Anantha K. Subramani, Ashish Goel, Wei Wang, Bharath Swaminathan, Vijay D. Parkhe | 2017-12-26 |
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Amit Khandelwal, Avgerinos V. Gelatos, Olkan Cuvalci, Kai Wu +1 more | 2017-10-10 |