Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9853579 | Rotatable heated electrostatic chuck | Anantha K. Subramani, Ashish Goel, Bharath Swaminathan, Vijay D. Parkhe, Xiaoxiong Yuan | 2017-12-26 |
| 9831074 | Bipolar collimator utilized in a physical vapor deposition chamber | Joung Joo Lee, Guojun Liu, Prashanth Kothnur | 2017-11-28 |
| 9705703 | System and method for simultaneous communication on Modbus and DNP 3.0 over Ethernet for electronic power meter | Erran Kagan, Frederick B. Slota, Joseph Spanier | 2017-07-11 |
| 9673074 | In-situ temperature measurement in a noisy environment | Hanbing Wu, Anantha K. Subramani, Aaron Muir Hunter | 2017-06-06 |