Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9853579 | Rotatable heated electrostatic chuck | Anantha K. Subramani, Ashish Goel, Wei Wang, Vijay D. Parkhe, Xiaoxiong Yuan | 2017-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9853579 | Rotatable heated electrostatic chuck | Anantha K. Subramani, Ashish Goel, Wei Wang, Vijay D. Parkhe, Xiaoxiong Yuan | 2017-12-26 |