Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9853579 | Rotatable heated electrostatic chuck | Ashish Goel, Wei Wang, Bharath Swaminathan, Vijay D. Parkhe, Xiaoxiong Yuan | 2017-12-26 |
| 9818587 | Off-angled heating of the underside of a substrate using a lamp assembly | Maurice E. Ewert, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish | 2017-11-14 |
| 9673074 | In-situ temperature measurement in a noisy environment | Hanbing Wu, Wei Wang, Aaron Muir Hunter | 2017-06-06 |
| 9666416 | Apparatus and method for depositing electronically conductive pasting material | John C. Forster, Wei Wang | 2017-05-30 |
| 9620339 | Sputter source for semiconductor process chambers | Tza-Jing Gung, Prashanth Kothnur, Hanbing Wu | 2017-04-11 |