Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673074 | In-situ temperature measurement in a noisy environment | Anantha K. Subramani, Wei Wang, Aaron Muir Hunter | 2017-06-06 |
| 9620339 | Sputter source for semiconductor process chambers | Anantha K. Subramani, Tza-Jing Gung, Prashanth Kothnur | 2017-04-11 |