Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831074 | Bipolar collimator utilized in a physical vapor deposition chamber | Joung Joo Lee, Guojun Liu, Wei Wang | 2017-11-28 |
| 9620339 | Sputter source for semiconductor process chambers | Anantha K. Subramani, Tza-Jing Gung, Hanbing Wu | 2017-04-11 |
| 9591738 | Plasma generator systems and methods of forming plasma | Huatan Qiu, David Cheung | 2017-03-07 |