Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842769 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2017-12-12 |
| 9748105 | Tungsten deposition with tungsten hexafluoride (WF6) etchback | Kai Wu | 2017-08-29 |
| 9685371 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2017-06-20 |
| 9653352 | Methods for forming metal organic tungsten for middle of the line (MOL) applications | Liqi Wu, Kazuya Daito, Kie Jin Park, Kai Wu, David Thompson | 2017-05-16 |