Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805963 | Electrostatic chuck with thermal choke | Maolin Long, Ying Wu, Quan Chau | 2017-10-31 |
| 9792393 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Richard A. Gottscho | 2017-10-17 |
| 9761459 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, John Drewery | 2017-09-12 |
| 9679751 | Chamber filler kit for plasma etch chamber useful for fast gas switching | Jon McChesney, Theo Panagopoulos, Craig Blair | 2017-06-13 |
| 9633846 | Internal plasma grid applications for semiconductor fabrication | Do-Young Kim, Gowri Kamarthy, Helene Del Puppo, Jen-Kan Yu, Monica Titus +5 more | 2017-04-25 |
| 9583357 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, John Drewery | 2017-02-28 |