Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805963 | Electrostatic chuck with thermal choke | Alex Paterson, Ying Wu, Quan Chau | 2017-10-31 |
| 9761459 | Systems and methods for reverse pulsing | Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson, John Drewery | 2017-09-12 |
| 9583357 | Systems and methods for reverse pulsing | Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson, John Drewery | 2017-02-28 |