Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824896 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, Qing Xu | 2017-11-21 |
| 9761459 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson | 2017-09-12 |
| 9607848 | Etch process with pre-etch transient conditioning | Wonchul Lee, Qian Fu | 2017-03-28 |
| 9583357 | Systems and methods for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson | 2017-02-28 |