Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805963 | Electrostatic chuck with thermal choke | Maolin Long, Alex Paterson, Ying Wu | 2017-10-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805963 | Electrostatic chuck with thermal choke | Maolin Long, Alex Paterson, Ying Wu | 2017-10-31 |