Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9792393 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2017-10-17 |
| 9640371 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Jorge Luque, Andrew D. Bailey, III, Ramkumar Subramanian, Yoko Yamaguchi | 2017-05-02 |