Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735069 | Method and apparatus for determining process rate | Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Seonkyung Lee, Thorsten Lill | 2017-08-15 |
| 9640371 | System and method for detecting a process point in multi-mode pulse processes | Jorge Luque, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi | 2017-05-02 |
| 9548189 | Plasma etching systems and methods using empirical mode decomposition | Luc Albarede, Jorge Luque, Andrew D. Bailey, III | 2017-01-17 |