Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9792393 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2017-10-17 |
| 9640408 | Fast-gas switching for etching | Alexander Paterson | 2017-05-02 |