Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754771 | Encapsulated magnetron | Brian T. West, Michael S. Cox | 2017-09-05 |
| 9552967 | Abatement system having a plasma source | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2017-01-24 |
| 9543124 | Capacitively coupled plasma source for abating compounds produced in semiconductor processes | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2017-01-10 |