Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9767990 | Apparatus for treating a gas in a conduit | Jibing Zeng, Brian T. West, Manoj A. Gajendra | 2017-09-19 |
| 9659757 | Measuring and controlling wafer potential in pulsed RF bias processing | Andras Kuthi, Stephen Hwang, James C. Vetter, Greg Eilenstine, Tuan Ngo | 2017-05-23 |
| 9552967 | Abatement system having a plasma source | Michael S. Cox, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2017-01-24 |
| 9543124 | Capacitively coupled plasma source for abating compounds produced in semiconductor processes | Michael S. Cox, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2017-01-10 |