Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659757 | Measuring and controlling wafer potential in pulsed RF bias processing | Stephen Hwang, James C. Vetter, Greg Eilenstine, Rongping Wang, Tuan Ngo | 2017-05-23 |
| 9617965 | Repetitive ignition system for enhanced combustion | Jason M. Sanders, Daniel Singleton, Martin A. Gundersen | 2017-04-11 |
| 9564308 | Methods for processing bevel edge etching | Gregory Sexton, Andrew D. Bailey, III, Yunsang Kim | 2017-02-07 |