Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779971 | Methods and apparatus for rapidly cooling a substrate | Jallepally Ravi, Kirankumar Neelasandra SAVANDAIAH | 2017-10-03 |
| 9773692 | In-situ removable electrostatic chuck | Michael S. Cox, Lara Hawrylchak | 2017-09-26 |
| 9608549 | Electrostatic chuck | Vijay D. Parkhe, Cheng-Hsiung Tsai | 2017-03-28 |