Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779971 | Methods and apparatus for rapidly cooling a substrate | Jallepally Ravi, Steven V. Sansoni | 2017-10-03 |
| 9595464 | Apparatus and method for reducing substrate sliding in process chambers | Sriskantharajah Thirunavukarasu, Cheng-Hsiung Tsai, Kai Liang Liew | 2017-03-14 |